套准精度-在光刻工艺中转移图形的精度。
【计】 校准精度
alignment precision
暂无补充释义。
相关例句
相关词条
alignment
alignment
alignment
alignment target
functional alignment
alignment
out of alignment
alignment of the head to compensate for surface irregularities
alignment precision
暂无补充释义。
套准精度-在光刻工艺中转移图形的精度。
alignment
alignment
alignment
alignment target
functional alignment
alignment
out of alignment
alignment of the head to compensate for surface irregularities