The pressure range determines the importance of a lot of kinetic processes.首次尝试将这一模型推广到较低气压的感应耦合放电条件下。
This method is based on the kinetic model of nitrogen and can be used in pressure range 1-100 mTorr.这种方法基于氮等离子体动力学模型，适用于气压范围1-100毫托。