【电学】AIV-元素，AIII-BIV-化合物沉积

deposition

chemical vapor deposition

MOD metallo-organic deposition

chemical deposition excluded Se, Te, Cu-oxide,

ion sputter deposition

deposition by AIV-elements, AIII-BIV-compounds

deposition by electrodes on AIV-elements, AIII-BV-compounds

Al-deposition