The process defect, minor defect and key precess, their impact on quality and reliability, and the control method are introduced.
The process defect, minor defect and key precess, their impact on quality and reliability, and the control method are introduced.
重点介绍了国内外半导体器件制造工艺与器件可靠性的相关性报道:工艺缺陷、微缺陷、关键工艺对器件质量和可靠性的影响及其控制方法;