7 MV tandem accelerator, a 200kV ion implanter, and a TEM linked by a beam transport system.
7 MV tandem accelerator, a 200kV ion implanter, and a TEM linked by a beam transport system.
7MV串列加速器、一台国产200kV离子注入机和一台日立H800型透射电子显微镜组成,并通过联机传输系统实现联机。
7 MV tandem accelerator, a 200kV ion implanter, and a TEM linked by a beam transport system.
7MV串列加速器、一台国产200kV离子注入机和一台日立H800型透射电子显微镜组成,并通过联机传输系统实现联机。