The calculation way of the lattice mismatch through a new simpilied model between semiconductor epitaxy and substrate are analysed, and the way of determine the lattice mismatch in XRD are also discussed.
The calculation way of the lattice mismatch through a new simpilied model between semiconductor epitaxy and substrate are analysed, and the way of determine the lattice mismatch in XRD are also discussed.
结果表明，正三角形晶格和长方形晶格匹配，长方形晶格的宽列原子的匹配具有优先性，不受长列原子匹配的影响。