This paper introduces the sensors of temperature, humidity and pressure, applied in the laser interferometer for gauge block measurement with double wavelengths, describes the principle, design, uncertainty of measurement, as well as the method of calibra
This paper introduces the sensors of temperature, humidity and pressure, applied in the laser interferometer for gauge block measurement with double wavelengths, describes the principle, design, uncertainty of measurement, as well as the method of calibra
摘要本文介绍了双波长激光量块干涉仪中使用的温度、湿度和气压传感器，描述了其工作原理、设计方案、测量不确定度以及校准方法。