Although a simply constructed scanning-electron-microscope (SEM)-based e-beam writer can not be on a par with the commercially available multi-million-dollar e-beam writers, it offers a cost-effective solution for the research and development laboratories
Although a simply constructed scanning-electron-microscope (SEM)-based e-beam writer can not be on a par with the commercially available multi-million-dollar e-beam writers, it offers a cost-effective solution for the research and development laboratories
在新元件研发过程中，往往希望能在短时间内不需光罩就可以作成奈米结构，电子束曝光技术提供了一套很适合这目的的解决方案。