A high-resolution and high-precision instrument, dyamic capacitance measuring instrument of thin-film thick-ness, is introduced in this paper.
A high-resolution and high-precision instrument, dyamic capacitance measuring instrument of thin-film thick-ness, is introduced in this paper.
摘要本文介绍一种高精度高分辨率的仪器－电容式动态薄膜测厚仪。