We first expand the nonlinear temperature-dependent convective and radiative heat transfer coefficient about the ambient temperature by Taylor-series method, and then the crystal temperature and the pull rate as well as the bulk melt temperature are deter
We first expand the nonlinear temperature-dependent convective and radiative heat transfer coefficient about the ambient temperature by Taylor-series method, and then the crystal temperature and the pull rate as well as the bulk melt temperature are deter
分析之过程为首先将随温度变化之对流系数及辐射系数做泰勒级数展闭，再以摄动理论之技巧，同时求解晶圆棒之温度、拉伸速度及溶解液之温度。