A soft-ware implementing this method is presented as well, which has the capabilities of verifying standard cell layout, locating features with phase conflicts and giving out suggestions for modification.
A soft-ware implementing this method is presented as well, which has the capabilities of verifying standard cell layout, locating features with phase conflicts and giving out suggestions for modification.
基于此方法的软件工具能够检查标准单元版图，找出不符合交替移相掩模设计要求的图形，并给出相关的修改建议。