In resent years, the mature of Micro-Electro-Mechanical System (MEMs) and the rapid development of Nano-Technology make it possible to manufacture mechanical and electrical devices in nano-scale.
In resent years, the mature of Micro-Electro-Mechanical System (MEMs) and the rapid development of Nano-Technology make it possible to manufacture mechanical and electrical devices in nano-scale.
近年来由于微机电技术的成熟普及与奈米机电技术的发展，各种机电元件均趋于微型化。