Impress method examination showed that diamond film crashed but not shed at the region of around impress. Varied compounds(Ti8CuAl ,Ti AlC,AlMo C,Al Ti,Al Mo,MoC )formedbetween film and substrate could be examined by X-ray diffraction measurement.
Impress method examination showed that diamond film crashed but not shed at the region of around impress. Varied compounds(Ti8CuAl ,Ti AlC,AlMo C,Al Ti,Al Mo,MoC )formedbetween film and substrate could be examined by X-ray diffraction measurement.
采用压痕法检测膜基附着力时,压头周围的金刚石膜碎裂但没有脱落,XRD测试发现薄膜与衬底间生成了Ti_8CuAl_ 、Ti_ AlC、Al_Mo_ C、Al_ Ti、Al_ Mo、Mo_C等铜、碳、钛、铝、钼的多种化合物。