A resistance macromodel for deep-submicron process epi-type substrate based on the 2D device simulation is presented.
A resistance macromodel for deep-submicron process epi-type substrate based on the 2D device simulation is presented.
摘要提出了一种基于二维器件模拟的深亚微米工艺外延型衬底的电阻宏模型。