Micro-Electro-Mechanical System(briefly named MEMS)has grown up along with the development of semiconductor's integrate circuit minuteness machine technology and exceed exactitude machine process technology.Its characteristic such as micromation,integrati
Micro-Electro-Mechanical System(briefly named MEMS)has grown up along with the development of semiconductor's integrate circuit minuteness machine technology and exceed exactitude machine process technology.Its characteristic such as micromation,integrati
微机电系统技术(MEMS)是随着半导体集成电路微细加工技术和超精密机械加工技术的发展而发展起来的.其微型化、集成化、批量生产和多学科交叉等优良特性将对人类社会生活带来巨大的进步,是电子领域的新宠.