Low sputtering power results in less compact A1 film and weak interfacial adhesion, whereas high sputtering power overheats and considerably bends the composite films.
Low sputtering power results in less compact A1 film and weak interfacial adhesion, whereas high sputtering power overheats and considerably bends the composite films.
结果表明：溅射功率是决定复合薄膜质量的重要因素，功率过低得不到致密的铝层结构，而且铝层容易从氟塑料表面脱离，功率过高则会产生很强的热效应而使复合薄膜弯曲。