Wang Yongqian,Liao Xianbo,Ma Zhixun,et al.Solid-phase Crystallization and Dopant Activation of Amorphous Silicon Films by Pulsed Rapid Thermal Annealing[J].Applied Surface Science,1998 135:205.
Wang Yongqian,Liao Xianbo,Ma Zhixun,et al.Solid-phase Crystallization and Dopant Activation of Amorphous Silicon Films by Pulsed Rapid Thermal Annealing[J].Applied Surface Science,1998 135:205.
薛清,郁伟中,黄远明.利用快速退火法从非晶硅薄膜中生长纳米硅晶粒[J].物理实验,200222(8):17.