Abstract: In this paper, the design of the sense organ of the silicon miniature inertial meter is presented .The approving structure of the sense organ is fulfilled by the fabrication techniques of laser processing and chemical etching, laser fibre optic
Abstract: In this paper, the design of the sense organ of the silicon miniature inertial meter is presented .The approving structure of the sense organ is fulfilled by the fabrication techniques of laser processing and chemical etching, laser fibre optic
文摘:设计了硅微型惯性加速度计的敏感头并应用激光加工和化学蚀刻相结合的工艺方法制造得到了满意的结构，应用激光光纤测振仪检测了悬臂梁振动特性。