According to the experimental results, the critical loads are higher as more nitrogen containing; however, the critical load of the film of 66 percent nitrogen containing is very low because of much graphitizing.
According to the experimental results, the critical loads are higher as more nitrogen containing; however, the critical load of the film of 66 percent nitrogen containing is very low because of much graphitizing.
由实验结果可得知,当类钻碳薄膜的氮含量提高时,其刮痕试验得到的临界负荷值会变大,但是当氮含量达到66%时,因为类钻碳膜已有石墨化的现象,临界负荷值则会急据的下降。