Linearity of the calibration curves was rather good after correction of sputter rate, with correlation coefficients of above 0.99 for most elements.
Linearity of the calibration curves was rather good after correction of sputter rate, with correlation coefficients of above 0.99 for most elements.
经溅射率校正后的工作曲线线性较好，大部分元素的相关系数在0.99以上。